Process Hierarchy

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  Diffusion
Process characteristics:
Ambient
Ambient to which substrate is exposed during diffusion process (if known)
Ambient
Available  
Selected
Ambient to which substrate is exposed during diffusion process (if known)
Depth
Diffusion depth (at specified dopant concentration).
Depth
Diffusion depth (at specified dopant concentration).
unconstrained
Dopant concentration
Dopant concentration at specified diffusion depth.
Dopant concentration
Dopant concentration at specified diffusion depth.
unconstrained
Dopant type
Doping element.
Dopant type
Doping element.
Sides processed
Specify whether diffusion is to occur on a single or both sides of substrate.
Sides processed
Specify whether diffusion is to occur on a single or both sides of substrate.
Temperature
Preferred diffusion temperature (if known).
Temperature
Preferred diffusion temperature (if known).
unconstrained
Equipment